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Which is more efficient for polishing silicon wafers, neutral silica sol or alkaline silica sol?
Alkaline silica sol. The silica particles in neutral silica sol have less charge and weak interaction with the surface of silicon wafer. Alkaline silica sol contains more silica particles and carries more charges, so that alkaline silica sol can be adsorbed on the surface of silicon wafer more effectively and achieve better polishing effect. Moreover, the reaction speed of alkaline silica sol is faster, which is also helpful to improve polishing efficiency.