Teaching and Scientific Research in Wang Shuai

1. Key project of National Natural Science Foundation: "Interaction between Low-voltage Multi-frequency Plasma and Materials" (No.:1050 10), 2.2 million yuan, 2007.338+0-206438+00.6438+02.

2. General Project of National Natural Science Foundation: "Numerical Simulation of Plasma Circuit Breaker" (No.:1076003), 220,000 yuan, 2004 438+0-2006 438+02.

3. R&D project of Zhongwei (Shanghai) Semiconductor Equipment Manufacturing Co., Ltd.: "Computer Simulation in plasma etching machine", 240,000 yuan, 2005.5-2007.6438+02. Project leader:

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