Mask aligner is one of the core devices in chip manufacturing, which can be divided into several types according to their uses: there are mask aligner used to produce chips; Mask aligner for packaging; There is also a projection mask aligner used in the field of LED manufacturing. Mask aligner, which is used to produce chips, is the largest short board made by semiconductor equipment in China. The high-end mask aligner that domestic fabs need depends entirely on imports. Mask aligner is regarded as the crown jewel of the integrated circuit industry by the industry, with high technical and financial thresholds for research and development. Because of this, there are few manufacturers that can produce high-end mask aligner. Up to the most advanced 14nm mask aligner, only ASML, Japanese Canon and Nikon have basically given up the research and development of the sixth generation EUV mask aligner. In contrast, domestic mask aligner manufacturers are very shabby.
Mask aligner of Shanghai Microelectronics Equipment (Group) Co., Ltd. is mainly used in the manufacturing fields of integrated circuit front circuit, advanced packaging, FPD, MEMS, LED and power devices. About 50-60 units will be shipped in 20 18. Operating income has not been announced, and the government subsidizes a lot. Mask aligner, which is in the leading position in technology and has the best mass production performance, is 90nm mask aligner, so there is a big gap in manufacturing technology. The high-end mask aligner needed by domestic fabs depends entirely on imports.
2016165438+1October 15 National Science and Technology Major Project led by Changchun Institute of Optics and Mechanics 02? Extreme ultraviolet lithography key technology research? The project successfully completed the field test before acceptance. With the joint efforts of Changchun Institute of Optics and Mechanics, Chengdu Institute of Optoelectronics, Shanghai Institute of Optics and Mechanics, Institute of Microelectronics of Chinese Academy of Sciences, Beijing Institute of Technology, Harbin Institute of Technology and Huazhong University of Science and Technology, after eight years' efforts, we have successfully completed the scheduled research contents and key tasks, broken through the core optical technologies that restrict the development of extreme ultraviolet lithography in China at this stage, and initially established a processing, testing, coating and system integration platform suitable for the development of medium exposure optical systems in extreme ultraviolet lithography.
Established in April 2006, Hefei Xinshuo Semiconductor Co., Ltd. is the first semiconductor direct writing lithography equipment manufacturer in China. The ATD4000 independently developed by the company has achieved mass production up to 200nm.
Wuxi Su Ying was established in June, 20 15. Su Ying Company is a high-tech enterprise specializing in microelectronic equipment, which was jointly initiated by Institute of Microelectronics, Chinese Academy of Sciences, senior technical team and industrial fund. Film Speed Company has successfully developed the laser direct writing/plate making lithography equipment used in the semiconductor field and the first international double high-speed laser direct imaging connection equipment (LDI), and achieved the maximum production of 200nm. Wuxi Su Ying was established in June, 20 15. Su Ying Company is a high-tech enterprise specializing in microelectronic equipment, which was jointly initiated by Institute of Microelectronics, Chinese Academy of Sciences, senior technical team and industrial fund. Film Speed Company has successfully developed the laser direct writing/plate making lithography equipment used in the semiconductor field and the first international double high-speed laser direct imaging connection equipment (LDI), and achieved the maximum production of 200nm.
Xianteng Optoelectronics was established in April 20 13, and has achieved the maximum mass production of 200nm. At the 20 14 international semiconductor equipment and materials exhibition, xianteng optoelectronics demonstrated its LED mask aligner production technology with completely independent intellectual property rights, which shocked four people.