At present, due to the different requirements of microelectronics manufacturers for electronic grade hydrofluoric acid, it can be divided into four grades:

1 low-grade products, used for > 1.2μmIC process manufacturing;

2. Middle and low-grade products, suitable for the production of 0.8 ~ 1.2 micron integrated circuit technology;

3. Medium and high-grade products, suitable for the production of 0.2 ~ 0.6 micron integrated circuit technology;

4 uninterruptible power supplies, suitable for 0.09 ~ 0.2 micron and