Chinese name: hexafluoroethane English name: hexafluoroethane alias: perfluoroethane, R 1 16 refrigerant chemical formula: C2F6 molecular weight: 138.0 1 CAS registration number: 76- 16-4 EINECS registration number: 200. 438+05% density: 5.734 kg m-3 (24℃) Appearance: colorless and odorless gas Flash point: meaningless (nonflammable) use: used as a dangerous symbol of insulating gas and plasma etchant and high dielectric strength coolant: n Hazard description: transport number of dangerous goods harmful to the environment: UN 2 193 2.2 Physical property data. Toxicological data, safety information, emergency measures, first aid measures, fire prevention measures, leakage treatment, operation disposal and storage, operation precautions, operation 2. Density (g/ml, 25℃): 1.607 3. Relative vapor density (g/ml, air =1): 4.7 4. Melting point? C):- 100.65, boiling point (? C, atmospheric pressure): -78.2 6, critical temperature (k): 19.857, critical pressure (MPa): 3.0438, critical density (g cm-3): 0.6229, critical volume (cm 3 mol-1):. C): 182 13, van der Waals area (cm2 mol-1): 6.900×10914, critical temperature (? C): 145.7 15, critical pressure (MPa): 3.29 16, Leonard-Jones parameter (a): 5.557 1. 17, Leonard-Jones parameter. Van der Waals volume (cm 3 mol-1): 42.66019, solubility: slightly soluble in water 20, gas standard claimed heat (enthalpy) (kj mol-1):-1,kloc-0/. : 332.522, phase standard free energy of formation (kj mol- 1 surface tension (dyne/cm): 8.05, dielectric constant: unavailable 6, dipole distance (1 0-24cm3): unavailable 7, polarizability: 4.84, calculated chemical data/kloc-. Number of tautomers: none; Polar surface area of topological molecules: 0.7; Number of heavy atoms: 8.8; Surface charge: 0.9; Complexity: 61.510; Isotopic atomic number: 0.11; Confirmed number of atomic solid centers: 0. 12. The number of confirmed chemical bond stereocenters is 0 14, the number of uncertain chemical bond stereocenters is 0 15, and the number of covalent bond units is 1. Using activated carbon and fluorine as raw materials, high concentration fluorine gas was slowly introduced into the reactor filled with activated carbon, and the reaction temperature was controlled by controlling electric heating, fluorine supply rate and cooling the reactor. After dust removal, alkali washing and dehydration, the crude products containing CF 4, C 2 F 6 and C 3 F 8 can be obtained. Then C 2 F 6 was extracted from the crude mixture by intermittent low-temperature rectification, and then C 2 F 6 was obtained by further low-temperature adsorption dehydration with molecular sieve. Hexafluoroethane can be used as a multifunctional etching technology, which is commonly used in semiconductor production. It can be used for selective etching of metal silicide and metal oxide relative to their metal matrix. In addition, it is also used to etch silicon dioxide on silicon. Hexafluoroethane can be used as refrigerants R508A (6 1% in hexafluoroethane) and R508B (54% in hexafluoroethane) together with trifluoromethane. Toxicological data Acute toxicity: rats inhaled LC: > 20pph /2H, rats inhaled 80%(20% O 2 )×4h, which was close to lethal concentration. This product can cause rapid asphyxia. Causes headache, nausea and dizziness after contact. It can be regarded as a non-toxic gas, but when it burns with combustible gas, it decomposes to produce toxic fluoride. Health hazards of safety information: this product can cause rapid suffocation. Causes headache, nausea and dizziness after contact. Environmental hazard: it is less harmful to the environment, can pollute the water body and the atmosphere, and has no damage to the atmospheric ozone layer, so it belongs to ODS substitutes. Danger of explosion: This product is nonflammable. Emergency measures first aid measures inhalation: leave the scene quickly to a place with fresh air. Keep the respiratory tract unobstructed. If you have difficulty breathing, give oxygen. If breathing stops, give artificial respiration immediately. See a doctor. Hazard characteristics of fire-fighting measures: In case of high heat, the pressure inside the container increases, which is in danger of rupture and explosion. Harmful combustion products: hydrogen fluoride. Fire extinguishing method: cut off the gas source quickly, spray water to protect the personnel who cut off the gas source, and then choose the appropriate fire extinguishing agent according to the fire cause. Move the container from the fire to an empty place as much as possible. Spray water to keep the burning container cool until the fire goes out. Emergency treatment of leakage: quickly evacuate people in the leakage and pollution areas to the windward, isolate them, and strictly restrict access. It is recommended that emergency personnel wear self-contained positive pressure respirator. Cut off the leakage source as much as possible. Reasonable ventilation and accelerated diffusion. If possible, move the leaking container to an open place and pay attention to ventilation. Leaked containers should be properly treated, repaired and inspected before use. Precautions for operation, handling and storage should be closed and fully ventilated. Operators must be specially trained and strictly abide by the operating procedures. It is recommended that the operator wear a filter gas mask (half mask). Prevent the gas in the workplace from leaking into the air. Avoid contact with oxidants. Wear safety helmet and gas cylinder shock-proof rubber band when handling to prevent gas cylinder from collision and damage. Equipped with leakage emergency treatment equipment. Storage precautions are stored in a cool and ventilated warehouse. Stay away from fire and heat sources. Should be stored separately from oxidant, and should not be mixed. The storage area should be equipped with emergency treatment equipment for leakage. Personal protective engineering control: the production process is closed and fully ventilated. Respiratory system protection: When the air concentration is high, filter gas mask (semi-mask) or air respirator should be selected according to the concentration of polluted gas and the lack of oxygen in the working environment. Eye protection: Wear chemical safety glasses when necessary. Physical protection: generally no special protection is needed. Hand protection: wear gloves for general operation. Other protection: avoid high concentration inhalation. Disposal method of waste: dispose according to the requirements of relevant national and local laws and regulations. Or contact the manufacturer or manufacturer to determine the treatment method. Transport information dangerous goods number: 22034 UN number: 2 193 packing category: O53 packing method: steel cylinder. Precautions for transportation: the safety helmet on the cylinder must be worn when transporting the cylinder. Cylinders are generally flat, and the bottle mouths should be in the same direction and cannot cross; The height shall not exceed the vehicle guardrail, and it shall be fastened with triangular wooden mats to prevent rolling. It is forbidden to transport with oxidant. It should be transported in the morning and evening in summer to prevent sun exposure. When transporting by rail, it is forbidden to slip. Regulatory information: Regulations on the Safety Management of Hazardous Chemicals (promulgated by the State Council 1987 in February), Detailed Rules for the Implementation of the Regulations on the Safety Management of Hazardous Chemicals (Hua Laofa [1992] No.677) and Regulations on the Safe Use of Chemicals in the Workplace (issued by the Ministry of Labor [1996] 427). Classification and Labeling of Commonly Used Hazardous Chemicals (GB 13690-92) classifies this substance as Class 2.2 nonflammable gas.